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Application Note: Ultra-High Resolution Pattern Transfer for NanoFrazor Lithography

High-resolution lithography is a central fabrication step not only for current transistor devices, but also for emerging quantum electronics and nanophotonics. Today‘s and tomorrow‘s applications dictate shrinking of  the dimensions and increasing of the packaging density, so the resolution can’t be too high. While the ultra-high resolution lithography (smaller 50 nm) can be challenging on its own, pattern transfer – the next step after  lithography – is often the actual challenge. Here, we introduce a few strategies for combining the ultra-high resolution NanoFrazor lithography with etching and lift-off that were developed over the last years.

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