Your Challenge, Our Solution – 
Technical Workshop (in-person) on Advanced Micro and Nanofabrication for Biomedical Devices 

Heidelberg Instruments and micro resist technology GmbH are jointly organizing this technical workshop focusing on advanced micro-/ nanofabrication techniques and applications 

•    Maskless Laser Lithography 
•    Thermal Scanning Probe Lithography (t-SPL)
•    Two-Photon Polymerization (TPP)

as well as on biomaterials for the fabrication of 2D and 3D biosystems, including microfluidics, biosensors, bioMEMS and components:

Date:        May 9th, 2022, 13 h – 17 h
Venue:     Dorint Adlershof Berlin, 12489 Berlin, Conference Room Treptow

The workshop will take place prior to the International Forum on BioChips and BioChip Solutions to take place in Berlin, Germany scheduled from 10-11 May 2022.

The workshop will offer an optimal opportunity to interact with colleagues in diverse disciplines, discuss on state-of-the-art devices and support applied innovation in the micro-fabrication chain.

Event schedule and speakers of the technical workshop

12:00 h

Registration and Get together with small lunch

13:00 h

Welcome and introduction

13:15 h


Maskless Aligner - Fast prototyping without photo masks
Dr. Daniel-Alexander Braun, Technical Sales Manager,
Heidelberg Instruments Mikrotechnik GmbH

13:45 h

Hybrid Polymers: High-performance optical materials for micro- and nanofabrication
Dr. Maria Russew, Operations Manager Hybrid Polymers, micro resist technology GmbH

14:15 h

Coffee break

14:45 h

NanoFrazor Lithography for advanced 2D & 3D devices
Dr. Zhengming Wu, Senior Sales Engineer, Heidelberg Instruments nano AG

15:15 h

Functional Materials for life science applications - Microfluidics and more
Dr. Mirko Lohse, micro resist technology GmbH

15:45 h


16:15 h

Review / Open discussion

17:00 h

End of workshop 

Download the program as PDF.

Please fill out the form below to register for the workshop. Limited Seats available, registration will be on first come-first serve basis.