2:00 pm | Welcome |
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2:10 pm |
LAB14 the Innovation Lab for Micro- and Nanofabrication |
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2:30 pm |
Advances in Direct Write Lithography |
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2:50 pm | Additive manufacturing via 3D Laser Lithography Dr. Benedikt Stender, Multiphoton Optics GmbH, DE |
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3:10 pm | Rule OPC for Process and Fidelity Correction Daniel Ritter, GenISys GmbH, DE |
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3:30 pm | Laser Direct Write of photonic IC. Holger Sailer, Institut für Mikroelektronik Stuttgart (IMS Chips), DE |
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3:50 pm | Coffee Break & Networking |
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4:10 pm | Cross-functional photoresists and photopolymers enhancing micro- and nanofabrication Dr. Arne Schleunitz, micro resist technology GmbH, DE |
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4:30 pm | Hybrid 3D structuring by direct write lithography and thermal nanoimprint Helmut Schift, Paul Scherrer Institute (PSI), CH |
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4:50 pm | 30 years of ‘hot-nanotip’ technologies … and counting Prof. Jürgen Brugger, Microsystems Laboratory EPFL Lausanne, CH |
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5:10 pm |
Pushing the limits of thermal probe lithography with the NanoFrazor Dr. Simon Bonanni, Heidelberg Instruments Nano AG, CH |
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5:30 pm | Summary & Open Discussion |
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5:45 pm | Closing |