Join us for the Technical Workshop in Montpellier, France!

The 50th Edition of the International Conference on Micro- and Nano Engineering (MNE) will take place in Montpellier, France in September 2024.

The MNE conference, organized by the International Society for Micro- and Nanotechnology (iMNEs), is the premier international event for micro- and nanofabrication, manufacturing techniques, and applications in various fields such as electronics, photonics, energy, and life sciences. It gathers global researchers and experts to discuss the latest advancements and aims to promote and train young talent in micro and nano engineering.

The traditional workshop ahead the MNE 2024 jointly organized by Heidelberg Instruments Mikrotechnik, GenISys and micro resist technology on

Maskless Laser Lithography and Direct Write Technology for the Advanced Micro- and Nanofabrication

aims bringing together the lithography community – technical experts and users - to foster the exchange and discussion of the latest results in advanced micro- and nanofabrication techniques enabled by maskless lithography and direct-write technologies. Don’t miss this unique platform and register now!

When Monday, September 16, 2024, 13:30 – approx. 17:45 (CEST)
Where Le Corum, Montpellier, France (Room BARTHEZ)
Cost The workshop is free of charge.

Coffee, drinks, and snacks will be provided.

There will be a "40 Years Heidelberg Instruments & New NanoFrazor" evening reception on Tuesday, September 17, starting at 6 p.m. in the "Bar à Tartines" at Le Corum Montpellier.

Below the agenda you can register for both the workshop and the reception or just for one of the two.

 

Agenda

13:30 Welcome & introduction
Daniel-Alexander Braun, Heidelberg Instruments Mikrotechnik, Heidelberg, Germany
13:40 The new NanoFrazor, modular and 10 times faster
Simon Bonanni, Heidelberg Instruments Nano, Zurich, Switzerland
14:05 Inducing non-homogeneous strain on MoS2 via grayscale t-SPL
Georgio Zambito, The University of Genoa, Italy
14:30 From diffractive optical elements to microlenses: Our journey with the MPO 100 3D lithography system
Daniel Klenkert, Technical University of Deggendorf, Deggendorf, Germany
14:55 Laser direct imaging breaks new ground: Structuring of film thicknesses up to 20 μm for microelectronics
Lynn Ratajczak, Fraunhofer Institute for Ceramic Technologies and Systems IKTS, Dresden, Germany
15:20 Coffee break & networking
15:50 From standard products over professional curve bending to rapid prototyping - The DWL 66+ at XRnanotech
Jan Erjawetz, XRnanotech, Untersiggenthal, Switzerland
16:15 Automatic generation and write (exposure) optimization for DOEs
Jörg Günther / Nezih Unal, GenISys, Taufkirchen, Germany
16:40 Innovative photoresists & polymers enabling advanced manufacture of photonic and micro-optical applications
Anja Voigt, Maria Russew, Arne Schleunitz, micro resist technology, Berlin, Germany
17:05 Summary / closing remarks
17:15 End of workshop

Event notice
For the interested community of e-beam technology and laser exposure tool users, GenISys is organizing the BEAMeeting MNE 2024 - Montpellier, France in the morning of Sept. 16, from 9:00 to 12:30 (CEST).

More details/registration here.

 

Register now!