NanoFrazor Webinar Series 2024/2025

Webinar 4: Grayscale Nanolithography and Its Application in Nanoelectronics

In this webinar, Berke Erbas, PhD student at EPFL, will present how grayscale nanolithography is revolutionizing the functionality of micro-nanodevices by enabling precise 3D nanopatterning with single-digit nanometer resolution and sub-nanometer depth control.

While traditional nanolithography focuses on downscaling, grayscale thermal scanning probe lithography (t-SPL) allows for the introduction of additional functionalities. The presentation will explore:

Key Topics Covered:

  • Achieving high-aspect ratio amplification of shallow polymer patterns into dielectric layers using plasma etching processes.
  • Scalable replication of grayscale nanopatterns through nanoimprint lithography.
  • Application of these techniques in strain engineering of 2D materials to enhance the mobility of FETs based on 2D semiconductors.
 

This session is ideal for researchers and professionals in nanoelectronics, 2D materials, and advanced micro/nanofabrication.

Nanoironing interface engineering using tSPL
A monolayer of MoS₂, grown using CVD, is transferred onto SiO₂ thin films that have been structured with deterministic grayscale nanotopographies using thermal scanning probe lithography. Next, the MoS₂ is patterned to create 2D FET semiconducting channels, and the source and drain electrodes are deposited using lift-off metallization.

Read the full abstract here.

Session Details:

Date: Tuesday, January 14, 2025

Time: 2:00–3:00 PM (CET)

The link to the webinar on MS Teams will be sent to you after registration.

Berke Erbas

About Berke Erbas

Berke Erbas obtained his BSc degree in Mechanical Engineering in 2019 from Istanbul Technical University and his MSc degree in Microengineering in 2021 from EPFL. He is currently a PhD student in the Microsystems and Microelectronics doctoral program at EPFL. His research focuses on grayscale nanolithography, micro/nanofabrication, and 2D material-based nanoelectronics.

Coming up next in our NanoFrazor series:

Yannik Glauser on January 21, 2025, 3:30-4:30 PM (CET)
▶ Grayscale Lithography for Nanophotonics Applications

Register now!